Mold, Fine Pattern Product, and Method of Manufacturing Those
AssigneeMaruzen Petrochemical Co., Ltd.
InventorsTakahisa Kusuura, Anupam Mitra, Yoshiaki Takaya, Takuro Satsuka
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Abstract
A mold 100 for imprinting has a mold pattern 2A for transferring a pattern to a processing object. A base layer 1 having a predetermined base pattern 1A is formed by imprinting on a thermoplastic resin, a thermosetting resin, a photo-curable resin, or the like, and a mold layer 2 is formed in such a way that the mode pattern 2A is shapened along a surface of the base pattern 1A by a surface preparation technique, such as CVD, PVD, or plating. Accordingly, there is provided a mold which has the same functions as those of conventionally-used silicon mold and metal mold and which facilitates manufacturing thereof.
Claims20
A mold for nanoimprinting, the mold including a mold pattern to be transferred to a processing object, the mold comprising:
- a base layer formed of a resin and including a predetermined base pattern;
- and
- a mold layer formed along the base pattern so as to shape the mold pattern.
A mold for nanoimprinting, the mold including a mold pattern to be transferred to a processing object, the mold comprising:
- a base layer including a predetermined base pattern;
- and
- a mold layer formed along the base pattern so as to shape the mold pattern and having a thickness less than or equal to 100 nm.
A method of manufacturing a mold for nanoimprinting, the mold including a mold pattern to be transferred to a processing object, the method comprising:
- a base layer formation step of forming a base layer formed of a resin and including a predetermined base pattern;
- and
- a mold layer formation step of forming a mold layer along the base pattern so as to shape the mold pattern.
A method of manufacturing a mold for nanoimprinting, the mold including a mold pattern to be transferred to a processing object, the method comprising:
- a base layer formation step of forming a base layer including a predetermined base pattern;
- and
- a mold layer formation step of forming a mold layer along the base pattern so as to shape the mold pattern and so as to have a thickness less than or equal to 100 nm.
Dependencies are inferred from the claim text.