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US 2010/0304026 A1Published application
Method and Apparatus for Manufacturing a Nanowire
AssigneePostech Academy-Industry Foundation
InventorsMoon-Ho Jo, Yun-Sung Woo, Geun-Hee Lee
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Abstract
A method and an apparatus for manufacturing a nanowire are provided. The method for manufacturing a nanowire includes i) providing a source gas into a chamber, ii) controlling the temperature of a substrate received in the chamber separately from the temperature of the source gas, iii) forming a temperature gradient on the substrate, and iv) forming a nanowire having at least one growth condition selected from a group of growth speed and growth direction controlled according to the temperature gradient on the substrate.
Claims18
A method for manufacturing a nanowire comprising:
- providing a source gas in a chamber;
- controlling the temperature of a substrate received in the chamber separately from the temperature of the source gas;
- forming a temperature gradient on the substrate;
- and
- forming a nanowire having at least one growth condition selected from a group of growth speed and growth direction controlled according to the temperature gradient on the substrate.
2 more elements
(canceled)
Dependencies are inferred from the claim text.