Electrode passivation
AssigneeDelaware Capital Formation, Inc.
InventorsJeffrey C. Andle, Reichl B. Haskell, John H. Bradshaw
Life of this patent
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Abstract
A coating providing high abrasion and chemical resistance composed of a barrier layer from vanadium, molybdenum, niobium, tantalum and the like, and an outer layer of diamond-like carbon. The coating is especially applicable for acoustic wave device (AWD) based sensors, and for passivating an electrode such as an electrode deposited on the AWD sensing area. The coating provides excellent mechanical and acoustical characteristics for coating acoustic wave devices allowing the sensor to operate in harsh environments.
Claims20
A method of passivating an electrode, the method comprising the steps of:
- depositing a barrier layer onto said electrode or a portion thereof, the barrier layer comprising at least one metal selected from the group consisting of tantalum, niobium, vanadium, molybdenum, or a combination thereof;
- and,
- depositing an abrasive resistant layer comprising Diamond-Like Carbon (DLC) onto said barrier layer.
A method of passivating an electrode comprising the steps of:
- depositing an adhesion layer comprising titanium, zirconium, or a combination thereof, over at least a portion of the electrode;
- depositing a barrier layer comprising niobium, tantalum, or a combination thereof, onto said adhesion layer or a portion thereof;
- and,
- depositing an abrasive resistant layer of diamond like carbon (DLC) onto said barrier layer.
Dependencies are inferred from the claim text.