Fine-structure transfer apparatus
AssigneeHitachi High-Technologies Corporation
InventorsKyoichi Mori, Noritake Shizawa, Naoaki Yamashita, Koji Tsushima, Toshimitsu Shiraishi
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AssigneeHitachi High-Technologies Corporation
InventorsKyoichi Mori, Noritake Shizawa, Naoaki Yamashita, Koji Tsushima, Toshimitsu Shiraishi
Estimating the term…
A fine-structure transfer apparatus has a base plate, a first post and a second post erected on the upper surface of the base plate, an elongated stamper that is fixed at one end to the upper end face of the first post. The stamper is supported at the other end in a vertically movable manner by means of an ascending/descending unit provided on the second post. A transfer element holding stage is provided on the upper surface of the base plate between the first and second posts in a position that corresponds to the position of the lower surface of the elongated stamper where a fine pattern is formed. A pressure-applying unit is provided to reciprocate on the upper surface of the elongated stamper along a longitudinal direction thereof. The transfer apparatus is characterized by the ease with which the stamper can be detached from the transfer element.
A fine-structure transfer apparatus comprising a base plate, a first post and a second post erected on the upper surface of the base plate, an elongated stamper that is fixed at one end to the upper end face of the first post and which is supported at the other end in a vertically movable fashion by means of an ascending/descending unit provided on the second post, a transfer element holding stage provided on the upper surface of the base plate between the first and second posts in a position that corresponds to that position of the lower surface of the elongated stamper where a fine pattern is formed, and a pressure-applying unit provided to reciprocate on the upper surface of the elongated stamper along a longitudinal direction of the elongated stamper.
A fine-structure transfer apparatus for transferring a fine structure to both sides of a transfer element or an annular disk of substrate having a through-hole of a predetermined inner diameter in the center, which apparatus comprises a lower fine-structure transfer device and an upper fine-structure transfer device, wherein:
Dependencies are inferred from the claim text.