Method of treating a gas stream
OwnerJames Robert Smith, Gareth David Stantoninventors
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Abstract
A method is described for treating a gas stream containing either fuel only or both fuel and oxidant gases, such as hydrogen, nitrous oxide or a hydrocarbon gas. The gas stream is conveyed through a vacuum pumping arrangement comprising a plurality of pumping stages. Either immediately before or immediately after the final pumping stage, the steps of adding a gaseous oxidant to the gas stream and oxidising the fuel gas are performed. By treating the gas stream in this manner, the risk of uncontrolled combustion of the fuel gas can be minimised.
Claims14
A method of treating a gas stream containing a fuel gas, the method comprising the steps of:
- conveying the gas stream through a vacuum pumping arrangement comprising a plurality of pumping stages;
- and
- either immediately before or immediately after the final pumping stage, adding a gaseous oxidant to the gas stream and oxidising the fuel gas.
A method according to any preceding claim, wherein the fuel gas comprises one of a hydrocarbon, SiH4, CO, H2, NH3 and tetraethylorthosilicate.
A method according to any preceding claim, wherein the oxidant comprises oxygen.
A method according to any preceding claim, wherein the fuel gas is oxidised using a pilot burner.
Dependencies are inferred from the claim text.