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US 2010/0303653 A1Published application
Turbomolecular pump
AssigneeOerlikon Leybold Vacuum GmbH
InventorRainer Hoelzer
Life of this patent
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Abstract
A turbomolecular pump (10) includes a rotor (18) which is mounted on a housing (12) by at least one roller bearing (16). The roller bearing (16) comprises a non-rotating bearing shell (20) and a rotating bearing shell (22). The non-rotating bearing shell (20) is mounted on the housing (12) by an elastic vibration ring (14). The vibration ring (14) is of an anisotropic form, such that the spring stiffness is inhomogeneous over the circumference.
Claims8
A turbomolecular pump comprising a rotor supported on a housing by means of a roller bearing,
- said roller bearing comprising a non-rotating bearing shell and a rotating bearing shell, and
- said non-rotating bearing shell being supported on the housing by an elastic vibration ring, wherein
- said vibration ring is of an anisotropic form such that its spring stiffness is inhomogeneous over its circumference.
A turbomolecular pump comprising:
- a housing;
- a roller bearing which supports a rotor in the housing, the roller bearing including a non-rotating bearing race and a rotating bearing race;
- and
- an elastic ring supporting the non-rotating bearing race in the housing, the elastic ring having anisotropic vibration damping properties with an inhomogeneous spring stiffness over its circumference.
1 more element
Dependencies are inferred from the claim text.