Vacuum pump

A vacuum pump comprising a power supply device that is integrated with a pump main unit, comprising:

• a cooling medium duct carrying a flow of a cooling medium within the pump main unit and the power supply device;
• a valve adjusting the flow rate of the cooling medium the cooling medium duct within the pump main unit and the power supply device;
• a condensation sensor detecting condensation within the power supply device;
• and
• a controller controlling the opening/closing of the valve;
• wherein:
• the controller, when the condensation sensor has detected condensation within the power supply device, fully closes the valve after stopping the operation of the vacuum pump.

A vacuum pump comprising a power supply device that is integrated with a pump main unit, comprising:

• a cooling medium duct carrying a flow of a cooling medium within the pump main unit and the power supply device;
• a valve adjusting the flow rate of the cooling medium the cooling medium duct within the pump main unit and the power supply device;
• a condensation sensor detecting condensation within the power supply device;
• a timer timing a condensation occurrence time interval by incrementing during time interval over which the condensation sensor detects condensation within the power supply device and decrementing from the accumulated time during the time interval over which the condensation sensor does not detect condensation within the power supply device;
• a notifyer providing a notification that condensation has occurred;
• and
• a controller controlling the opening/closing of the valve;
• wherein:
• the notifyer provide notification of the condensation when the time interval that has been timed by the timer exceeds a first threshold value;
• and
• the controller fully closes the valve after stopping the operation of the vacuum pump when the time interval that has been timed by the timer exceeds a second threshold value, which is greater than the first threshold value.

A vacuum pump comprising a power supply device that is integrated with a pump main unit, comprising:

• a cooling medium duct carrying a flow of a cooling medium within the pump main unit and the power supply device;
• a valve adjusting the flow rate of the cooling medium the cooling medium duct within the pump main unit and the power supply device;
• a condensation sensor detecting condensation within the power supply device;
• a timer timing a condensation occurrence time interval by incrementing during time interval over which the condensation sensor detects condensation within the power supply device and decrementing from the accumulated time during the time interval over which the condensation sensor does not detect condensation within the power supply device;
• a temperature sensor measuring the temperature within the power supply device;
• and
• a controller controlling the opening/closing of the valve;
• wherein:
• the controller, when the time interval that has been timed by the timing means exceeds a first threshold value, reduces the cooling medium flow rate within a range wherein the temperature within the power supply device, measured by the temperature sensor, is in a range that does not exceed a particular temperature, and when the time interval timed by the timer exceeds a second threshold value, which is greater than the first threshold value, fully closes the valve after stopping the operation of the vacuum pump.