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US 2010/0303584 A1Published application
Stepped Retaining Ring
AssigneeApplied Materials, Inc.
InventorsShaun Van Der Veen, Steven M. Zuniga
Life of this patent
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Abstract
A two part retaining ring is described. An rigid upper portion has an annular recess along its inner diameter. An annular wearable lower portion has an inner diameter, an annular extension defined by the inner diameter and a vertical wall that is perpendicular to a surface of the second portion and opposite to the inner diameter. The annular extension fits into the annular recess of the annular first portion. A bonding material is on the vertical wall of the annular second portion.
Claims18
A retaining ring, comprising:
- an annular lower portion of a first material, the lower portion having a lower surface to contact the polishing pad and an upper surface, wherein the upper surface of the lower portion includes an upwardly projecting step positioned along an inner diameter of the lower portion, and wherein a remainder of the upper surface of the lower portion between the step and an outer diameter of the lower portion has no step of equal or greater height;
- an annular upper portion of a different second material, the upper portion having a lower surface and an upper surface, wherein the lower surface of the upper portion includes a recess positioned along an inner diameter of the upper portion and the step fits into the recess, and wherein a remainder of the lower surface of the upper portion between the step and an outer diameter of the lower portion has no recess of equal or greater depth;
- and
- a bonding layer between the step and the recess.
1 more element
Dependencies are inferred from the claim text.