Optical device and method of fabricating the same
AssigneeElectronics and Telecommunications Research Institute
InventorsSahnggi Park, Kap-Joong Kim, Duk Jun Kim, Gyungock Kim
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Abstract
Provided are an optical device and a method of fabricating the same. The optical device includes: a substrate; and a ring resonator on the substrate. The ring resonator includes: a cladding layer including a lower cladding layer and an upper cladding layer on the substrate; a core including a plurality of rings between the lower cladding layer and the upper cladding layer; and an embeded layer interposed between the core and the cladding layer and having a refractive index less than that of the core and more than that of the cladding layer.
Claims15
An optical device comprising:
- a substrate;
- and
- a ring resonator on the substrate;
- wherein the ring resonator comprises:
- a cladding layer including a lower cladding layer and an upper cladding layer on the substrate;
- a core including a plurality of rings between the lower cladding layer and the upper cladding layer;
- and
- an embeded layer interposed between the core and the cladding layer and having a refractive index less than that of the core and more than that of the cladding layer.
A method of fabricating an optical device, the method comprising:
- providing a substrate including a resonance region;
- forming a plurality of rings through patterning a core layer on the substrate in the resonance region;
- forming an embeded layer at a space between the rings of the core;
- and
- forming a cladding layer on the embeded layer,
- wherein the embeded layer has a refractive index less than that of the core and more than that of the cladding layer.
Dependencies are inferred from the claim text.