Grazing incidence collector for laser produced plasma sources
AssigneeMedia Lario S.R.L.
InventorsIan Wallhead, Fabio Zocchi
Life of this patent
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Abstract
Grazing incidence collectors (GICs) for extreme ultraviolet (EUV) and X-ray radiation sources, such as laser produced plasma (LPP) sources, are disclosed. Source-collector systems comprising GICs and LPP sources are also disclosed. A laser beam is directed along the collector axis to a fuel target to form the LPP source, and the collector is arranged to collect the radiation and reflect it to an intermediate focus. The collector may include one or more grazing-incidence mirrors, and these mirrors may be electroformed. lithography systems that employ the source-collector systems as disclosed herein.
Claims22
1-43. (canceled)
A source-collector system for extreme ultraviolet and X-ray radiation, comprising along an axis:
- a laser-produced plasma (LPP) source that includes a fuel target and that emits the radiation when the fuel target is irradiated by a laser beam directed along the axis;
- and
- a grazing incidence collector arranged along the axis and relative to the LPP source to collect a portion of the radiation and direct it to an intermediate focus on the axis.
A source-collector system for extreme ultraviolet and X-ray radiation, comprising along an axis:
- a laser-produced plasma (LPP) source that includes a fuel target;
- a laser that produces a laser beam, wherein the laser beam is directed to the fuel target to generate the radiation;
- and
- a grazing incidence collector arranged along the axis and relative to the LPP source, the grazing incidence collector comprising nested electroformed mirrors configured to collect a portion of the radiation and reflect it to an intermediate focus.
A method of collecting extreme ultraviolet or X-ray radiation, comprising:
- providing a grazing incidence collector having a collector axis;
- arranging a fuel target on the collector axis and at a position relative to the grazing incidence collector;
- irradiating the fuel target with a laser beam that travels along the optical axis to form a laser-produced plasma (LPP) source that emits the radiation;
- and
- collecting a portion of the radiation with the grazing-incidence collector and reflecting the collected radiation to an intermediate focus.
Dependencies are inferred from the claim text.