MEMS Device
AssigneeInfineon Technologies AG
InventorsFlorian Schoen, Mohsin Nawaz, Mihail Sararoiu
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Abstract
System and method for a microelectromechanical system (MEMS) is disclosed. A preferred embodiment comprises a first anchor region, a vibrating MEMS structure fixed to the first anchor region, a first electrode adjacent the vibrating MEMS structure, a second electrode adjacent the vibrating MEMS structure wherein the vibrating MEMS structure is arranged between the first and the second electrode.
Claims20
A microelectromechanical system (MEMS) comprising:
- a first anchor region;
- a vibrating MEMS structure fixed to the first anchor region;
- a first electrode adjacent the vibrating MEMS structure;
- a second electrode adjacent the vibrating MEMS structure wherein the vibrating MEMS structure is between the first and the second electrode.
A method for adjusting a resonance frequency of a microelectromechanical system (MEMS), the method comprising:
- providing a MEMS resonator comprising a resonator element, a first electrode and a second electrode, the resonator element being arranged between the first and the second electrode;
- applying a first bias voltage to the resonator element and the first electrode;
- and
- applying a second bias voltage to the second electrode, wherein the second bias voltage is independent from the first bias voltage.
A method to manufacture a resonator device, the method comprising:
- providing a resonator element having a first side and a second side;
- providing a first electrode;
- providing a second electrode;
- and
- wherein the first electrode is arranged at the first side and the second electrode is arranged at the second side of the resonator element.
A method to set a resonance frequency of a resonator, the method comprising:
- providing a resonator element having a first stiffness (k);
- providing a second stiffness (kelec) by applying a first bias voltage between the resonator element and a first electrode;
- and
- providing a third stiffness (ktrim) by applying a second voltage to a second electrode, wherein the resonance frequency of the resonator is set by the first, second and third stiffness.
Dependencies are inferred from the claim text.