Internal power supply circuit, semiconductor device, and manufacturing method of semiconductor device
AssigneeElpida Memory, Inc.
InventorKoichiro HAYASHI
Life of this patent
Estimating the term…
Abstract
To provide an internal power supply circuit that supplies a power supply voltage to an internal circuit of a semiconductor device via an internal power supply wiring, the internal power supply circuit includes a plurality of power supply units connected in common to the internal power supply wiring and an internal-power-supply control circuit that selects either activation or deactivation with regard to at least a part of the power supply units.
Claims22
A semiconductor device comprising:
- an internal circuit supplied with a power supply voltage;
- an internal power supply wiring connected to the internal circuit;
- a plurality of power supply units connected in common to the internal power supply wiring to supply the internal circuit with the power supply voltage via the internal power supply wiring;
- and
- a control circuit that activates or deactivates each of at least a part of the power supply units.
A semiconductor device comprising:
- an internal circuit supplied with a power supply voltage;
- an internal power supply wiring connected to the internal circuit;
- an oscillator circuit that generates a periodic signal having a predetermined cycle, the predetermined cycle being controlled by drive capability thereof;
- a pumping circuit that generates the power supply voltage by charging and discharging one or more capacitors using the periodic signal generated by the oscillator circuit, and supplies the internal circuit with the power supply voltage via the internal power supply wiring;
- and
- a control circuit that controls the drive capability of the oscillator circuit.
A manufacturing method of a semiconductor device having an internal power supply circuit, the internal power supply circuit includes:
- a plurality of power supply units connected in common to an internal power supply wiring that supplies a power supply voltage to an internal circuit of the semiconductor device;
- and
- a storage circuit that stores activation information of each of at least a part of the power supply units, wherein
- the method comprising:
- activating a part or all of the power supply units;
- measuring current supply capability of the internal power supply circuit;
- and
- writing the activation information into the storage circuit based on a measurement result.
Dependencies are inferred from the claim text.