Probing apparatus with multiaxial stages for testing semiconductor devices
AssigneeStar Technologies Inc.
InventorCHOON LEONG LOU
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Abstract
A probing apparatus for testing semiconductor devices comprises a housing configured to define a testing chamber, a device carrier positioned in the housing and configured to receive the semiconductor device, a platen positioned on the housing, an alignment module positioned on the platen, a planarity-adjusting module positioned on the alignment module, an angular adjusting module positioned on the planarity-adjusting module, and a card holder positioned on the angular adjusting module and configured to receive a probe card having a plurality of probes.
Claims19
A probing apparatus for testing semiconductor devices, comprising:
- a housing configured to define a testing chamber;
- a device carrier positioned in the housing and configured to receive the semiconductor device;
- a platen positioned on the housing;
- an alignment module positioned on the platen;
- a planarity-adjusting module positioned on the alignment module;
- an angular adjusting module positioned on the planarity-adjusting module;
- and
- a card holder positioned on the angular adjusting module and configured to receive a probe card having a plurality of probes.
A probe card manipulator, comprising:
- a base;
- an alignment module positioned on the base;
- a planarity-adjusting module positioned on the alignment module;
- an angular adjusting module positioned on the planarity-adjusting module;
- and
- a card holder positioned on the angular adjusting module and configured to receive the probe card having a plurality of probes.
Dependencies are inferred from the claim text.