Probe device
AssigneeTokyo Electron Limited
InventorsToshihiro Yonezawa, Shinichiro Takase
Life of this patent
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Abstract
A reinforcing member is formed at a top surface side of a probe card including a support plate for supporting a contactor and a circuit board. A plurality of long guide holes are formed in an outer peripheral portion of the reinforcing member. Fixing members fixed to a holding member and collars formed around outer circumferences of the fixing members are formed in the guide holes. A length in a longitudinal direction of each of the guide holes is greater than a diameter of each of the collars, and a central line in the longitudinal direction of each of the guide holes passes through a center of the reinforcing member. Due to the guide holes, horizontal expansion of the reinforcing member itself is allowed.
Claims4
A probe device which inspects electrical characteristics of an object to be inspected, the probe device comprising:
- a probe card comprising a support plate which supports a contactor that contacts the object to be inspected, and a circuit board disposed at a top surface side of the support plate;
- a reinforcing member having a part which is disposed at a top surface side of the circuit board and which reinforces the circuit board;
- a holding member which holds an outer peripheral portion of the reinforcing member,
- wherein fixing members fixed to the holding member are inserted into and pass through the outer peripheral portion of the reinforcing member,
- a plurality of guide holes which guide horizontal extension and contraction of the reinforcing member are formed to pass through the reinforcing member in a thickness direction of the reinforcing member,
- a length in a longitudinal direction of each of the guide holes is greater than a diameter of each of the fixing members when viewed from a plane, and
- a central line in the longitudinal direction of each of the guide holes passes through a center of the reinforcing member.
Dependencies are inferred from the claim text.