US 2010/0301887 A1 · PROBE CARD

Abstract

A probe card according to the present invention includes a support plate for supporting probes that contact an object to be inspected, a circuit board, a holding member for holding a lower surface of an outer peripheral portion of the support plate, and an abutting member disposed between the lower surface of the outer peripheral portion of the support plate and the holding member and protruding upward to abut to the lower surface of the outer peripheral portion of the support plate. Accordingly, horizontal expansion of the support plate itself is allowed, and at the time of inspecting electrical characteristics of the object to be inspected, even though the temperature of the support plate is increased and the support plate expands, the support plate can expand in a horizontal direction, thereby suppressing vertical deformation of the support plate.

Claims11

Dependent claims

A probe card which inspects electrical characteristics of an object to be inspected, the probe card comprising:

a circuit board;
a support plate which is disposed at a lower surface side of the circuit board and which supports a contactor that contacts the object to be inspected;
a holding member which holds a lower surface of an outer peripheral portion of the support plate;
and
an abutting member disposed between the lower surface of the outer peripheral portion of the support plate and the holding member, and protruding upward to abut to the lower surface of the outer peripheral portion of the support plate.

2 more elements

Dependencies are inferred from the claim text.

Probe card

Life of this patent

Probe card

Life of this patent

Abstract

Claims11