Back to results
US 2010/0301870 A1Published application
Flame ionization detector
AssigneeBayer Technology Services GmbH
InventorsJörg Müller, Winfred Kuipers
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeBayer Technology Services GmbH
InventorsJörg Müller, Winfred Kuipers
Estimating the term…
The flame ionization detector, which comprises a supply and an ignition device (7) for the combustible gas, a supply for the sample gas, a combustion chamber (4) in which the sample gas is ionized by the flame, and electrodes (8, 1) to which a voltage is applied in order to generate and measure the ion current, is distinguished in that it is constructed as an integrated planar system of at least three parallel platelet-like substrates (1, 2, 3) which are connected to one another and are processed by microsystem technology methods, with a central substrate (1) comprising nozzles (5, 6) for the gases and the ignition device (7) and a recess which forms a part of the combustion chamber (4), is completed by recesses in the neighboring substrates (2, 3) and is essentially closed together with the nozzle region by these substrates (2, 3), and the neighboring substrates (2, 3) comprise supply channels (10, 11) for the gases.
1-12. (canceled)
A flame ionization detector comprising
The flame ionization detector as claimed in claim 1, wherein the central substrate (1) is electrically conductive and the neighboring substrates (2, 3) are essentially nonconductive.
The flame ionization detector as claimed in claim 1, wherein central substrate (1) consists of silicon and the neighboring substrates (2, 3) consist of glass, in particular borosilicate glass.
The flame ionization detector as claimed in claim 1, wherein an electrode (8) is arranged in each of the neighboring substrates (2, 3) in the region of the combustion chamber (4).
The flame ionization detector as claimed in claim 2, wherein one electrode is formed by the central substrate (1).
The flame ionization detector as claimed in claim 1, wherein all the substrates (1, 2, 3) comprise parts with rounded contours.
The flame ionization detector as claimed in claim 1, wherein the substrates (1, 2, 3) are connected by anodic bonding.
The flame ionization detector as claimed in claim 4, wherein the electrodes (8) on the neighboring substrates (1, 2) are reflective.
The flame ionization detector as claimed in claim 1, wherein the nozzles (5, 6) for the gases are formed as a buried structure and are covered by at least one further substrate.
The flame ionization detector as claimed in claim 1, wherein the central substrate (1) comprises at least one electrode tip (7) immediately behind the nozzles (5, 6), to which a high-voltage pulse is being applied for ignition.
The flame ionization detector as claimed in claim 1, wherein the detector is provided with two high-induction magnets for forming a magneto-hydrodynamic generator.
Dependencies are inferred from the claim text.