Linear piezoelectric nano-positioner
AssigneeRHK Technology, Inc.
InventorsSergiy Pryadkin, Zhouhang Wang, Gennady Royzenblat, Xun Pan
Life of this patent
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Abstract
A linear piezoelectric nano-positioner includes an armature configured to be translated along a longitudinal axis and having oppositely-disposed bearing surfaces and oppositely-disposed piezo surfaces, bearing sets engaged with the bearing surfaces of the armature to translatably support the armature, and piezoelectric elements engaged with the piezo surfaces of the armature to translate the armature along the longitude axis.
Claims34
A linear piezoelectric nano-positioner, comprising:
- a base;
- an armature configured to be translated with respect to the base along a longitudinal axis;
- a first bearing set disposed between the base and the armature to translatably support the armature with respect to the base;
- a bearing clamp coupled to the base to movably secure the armature and the first bearing set with respect to the base;
- a second bearing set disposed between the bearing clamp and the armature to translatably support the armature with respect to the bearing clamp and being movably secured with respect to the base by the bearing clamp;
- at least one bearing spring to yieldably bias at least one of the first or second bearing sets against the armature in a first bias direction;
- a first set of piezoelectric elements disposed between the base and the armature to translate the armature with respect to the base;
- a piezo clamp coupled to the base to movably secure the armature and the first set of piezoelectric elements with respect to the base;
- and
- a second set of piezoelectric elements disposed between the piezo clamp and the armature to translate the armature with respect to the base and being movably secured with respect to the base by the piezo clamp.
A linear piezoelectric nano-positioner, comprising:
- an armature configured to be translated along a longitudinal axis and having oppositely-disposed bearing surfaces and oppositely-disposed piezo surfaces;
- bearing sets engaged with the bearing surfaces of the armature to translatably support the armature;
- and
- piezoelectric elements engaged with the piezo surfaces of the armature to translate the armature along the longitudinal axis.
A linear piezoelectric nano-positioner, comprising:
- a base including a seat section having a bearing pocket, a first leg portion extending from one end of the seat section, a second leg portion extending from another end of the seat section, a clamp flange extending from one side of the seat section, a third leg portion extending from one end of another side of the seat section, and a fourth leg portion extending from another end of the other side of the seat section;
- an armature configured to be translated with respect to the base along a longitudinal axis, and having a first surface, a second surface oppositely-disposed with respect to the first surface, a third surface, and a fourth surface oppositely-disposed with respect to the third surface and orthogonal to the first and second surfaces;
- a first bearing set disposed in the bearing pocket of the base and in engagement with the first surface of the armature to translatably support the armature with respect to the base;
- a bearing clamp coupled to the first and second leg portions of the base to movably secure the armature and the first bearing set with respect to the base;
- a second bearing set disposed between the bearing clamp and in engagement with the second surface of the armature to translatably support the armature with respect to the bearing clamp, and being movably secured with respect to the base by the bearing clamp;
- at least one bearing spring to yieldably bias at least one of the first or second bearing sets against the armature in a first bias direction;
- a first set of piezoelectric elements disposed between the clamp flange of the base and the third surface of the armature to translate the armature with respect to the base;
- a piezo clamp coupled to the third and fourth leg portions of the base to movably secure the armature and the first set of piezoelectric elements with respect to the base;
- and
- a second set of piezoelectric elements disposed between the piezo clamp and the fourth surface of the armature to translate the armature with respect to the base and being movably secured with respect to the base by the piezo clamp.
A multi-axis piezoelectric system, comprising:
- a first linear piezoelectric nano-positioner to move along a first longitudinal axis;
- a second linear piezoelectric nano-positioner coupled to the first linear piezoelectric nano-positioner to move along a second longitudinal axis offset with respect to the first longitudinal axis;
- wherein each of the first and second linear piezoelectric nano-positioners includes:
- an armature configured to be translated along a longitudinal axis and having oppositely-disposed bearing surfaces and oppositely-disposed piezo surfaces;
- bearing sets engaged with the bearing surfaces of the armature to translatably support the armature;
- and
- piezoelectric elements engaged with the piezo surfaces of the armature to translate the armature along the longitudinal axis.
Dependencies are inferred from the claim text.