US 2010/0301706 A1 · DIFFERENTIAL PIEZOELECTRIC SENSOR

Abstract

A differential piezoelectric sensor (20) includes a suspended structure (24) coupled to a substrate (22). The suspended structure (24) has at least one location (44) in a first stress state (70) and at least one location (46) in a second stress state (72) when the suspended structure (24) is in a stress position (69). Piezoelectric elements (26) are located on the suspended structure (24) at the locations (44), each producing a signal (78) in response to mechanical stress (68) experienced by the suspended structure (24). In addition, piezoelectric elements (28) are formed on the suspended structure (24) at the locations (46), each producing a signal (80) in response to the mechanical stress (68). The piezoelectric elements (26, 28) are electrically connected to combine the signals (78, 80) so as to obtain a signal (76) representative of the mechanical stress (68) experienced by the suspended structure (24).

Claims20

Dependent claims

A piezoelectric sensor comprising:

a substrate;
a suspended structure coupled to said substrate, said suspended structure having a first location in a first stress state when said suspended structure is in a stress position, and said suspended structure having a second location in a second stress state when said suspended structure is in said stress position, said second stress state being opposite said first stress state;
a first piezoelectric element located at said first location, said first piezoelectric element producing a first signal in response to mechanical stress experienced by said suspended structure when said suspended structure is in said stress position;
and
a second piezoelectric element located at said second location, said second piezoelectric element producing a second signal in response to said mechanical stress, and said second piezoelectric element being electrically coupled with said first piezoelectric element to combine said first and second signals to obtain a signal representative of said mechanical stress.

2 more elements

A piezoelectric sensor comprising:

a substrate;
a suspended structure having a first end and a second end, each of said first and second ends being anchored to said substrate so that said suspended structure is spaced apart from said substrate, said suspended structure including a first beam section proximate said first end, a second beam section proximate said second end, and an intermediate section interposed between said first and second beam sections, said intermediate section including a mass element, wherein said suspended structure has a first location on one of said first and second beam sections in a first stress state when said suspended structure is in a stress position, and said suspended structure has a second location on one of said first and second beam sections in a second stress state when said suspended structure is in said stress position, said second stress state being opposite said first stress state;
a first piezoelectric element located at said first location, said first piezoelectric element producing a first signal in response to mechanical stress experienced by said suspended structure when said suspended structure is in said stress position;
and
a second piezoelectric element located at said second location, said second piezoelectric element producing a second signal in response to said mechanical stress, and said second piezoelectric element being electrically coupled with said first piezoelectric element to combine said first and second signals to obtain a signal representative of said mechanical stress.

2 more elements

A piezoelectric sensor comprising:

a substrate;
a suspended structure having a first end and a second end, each of said first and second ends being anchored to said substrate so that said suspended structure is spaced apart from said substrate, said suspended structure having a first location on a surface of said suspended structure, said first location being in a first stress state when said suspended structure is in a stress position, and said suspended structure having a second location on said surface of said suspended structure, said second location being in a second stress state when said suspended structure is in said stress position, said second stress state being opposite said first stress state;
a first piezoelectric element located at said first location, said first piezoelectric element producing a first signal in response to mechanical stress experienced by said suspended structure when said suspended structure is in said stress position;
and
a second piezoelectric element located at said second location, said second piezoelectric element producing a second signal in response to said mechanical stress, and said second piezoelectric element being electrically coupled with said first piezoelectric element to combine said first and second signals to obtain a signal representative of said mechanical stress.

2 more elements

Dependencies are inferred from the claim text.

Differential piezoelectric sensor

Life of this patent

Differential piezoelectric sensor

Life of this patent

Abstract

Claims20