Integration of piezoelectric materials with substrates
AssigneeSand9, Inc.
InventorsDavid M. Chen, Jan H. Kuypers, Alexei Gaidarzhy, Guiti Zolfagharkhani
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Abstract
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer.
Claims47
A device comprising:
- a substrate comprising a first material;
- a mechanical resonator comprising a piezoelectric material, different from the first material,
- wherein the mechanical resonator is integrated with the substrate.
A device comprising:
- a substrate comprising a first material;
- and
- a mechanical resonator comprising quartz and integrated with the substrate,
- wherein the first material is not quartz.
The device of 23, further comprising integrated circuitry formed on the cap and coupled to the mechanical resonator to control the mechanical resonator
A device comprising:
- a substrate comprising a first material;
- a mechanical resonator comprising a single crystal piezoelectric material, different from the first material, and integrated with the substrate;
- and
- integrated circuitry coupled to the mechanical resonator.
A device comprising:
- a substrate formed of a semiconductor material comprising silicon;
- a mechanical resonator comprising quartz and integrated with the substrate;
- and
- integrated circuitry formed on the substrate and coupled to the mechanical resonator to control operation of the mechanical resonator and/or to detect vibration of the mechanical resonator.
A method of fabricating a device, the method comprising:
- bonding a wafer comprising a piezoelectric material to a wafer comprising a first material, the first material being different than the piezoelectric material;
- and
- forming a mechanical resonator from the wafer of the piezoelectric material.
Dependencies are inferred from the claim text.