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US 2010/0301702 A1Published application
High gain miniature power supply for plasma generation
AssigneeGeneral Electric Company
InventorsFengfeng Tao, Grover Andrew Bennett, JR., Frank Jakob John Mueller, Robert Carl Murray, Seyed Gholamali Saddoughi, Edward Henry Allen
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Abstract
A high gain pulse generator includes a piezoelectric transformer (PT) that is driven by an input power stage to drive the PT at a desired PT resonant frequency such that at least one PT characteristic substantially matches at least one non-linear load characteristic such as, without limitation, a plasma load characteristic to deliver a desired pulse to the non-linear load.
Claims20
A pulse generator comprising:
- a piezoelectric transformer (PT);
- and
- a power stage configured to drive the PT at a desired PT resonant frequency such that the PT achieves a desired high voltage transformation ratio to deliver a corresponding high voltage pulse to a non-linear load.
A pulse generator comprising:
- a piezoelectric transformer (PT);
- and
- a solid-state resonant inverter configured to drive the PT at a desired PT resonant frequency such that the PT delivers a corresponding high voltage pulse to a non-linear load.
A pulse generator comprising:
- a piezoelectric transformer (PT);
- and
- a power stage configured to drive the PT such that at least one PT characteristic substantially matches at least one non-linear load characteristic.
A pulse generator comprising:
- a piezoelectric transformer (PT);
- and
- a power stage configured to drive the PT at a desired PT resonant frequency such that at least one PT characteristic substantially matches at least one non-linear load characteristic at the desired PT resonant frequency.
Dependencies are inferred from the claim text.