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US 2010/0301564 A1Published application
Balancing pressure to improve a fluid seal
AssigneeNEXX Systems, Inc.
InventorsArthur Keigler, Qunwei Wu, Zhenqiu Liu, John Harrell
Life of this patent
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Abstract
A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.
Claims13
A method of fluid sealing a workpiece, comprising:
- providing a force to cause a ring to form a barrier to fluid entry with the workpiece;
- and
- preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.
Dependencies are inferred from the claim text.