Improvements in or relating to integrated circuit reliability
AssigneeST Microelectronics (Crolles 2) SAS and Freescale Semiconductor, Inc.
InventorsHisao Kawasaki, David Ney
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AssigneeST Microelectronics (Crolles 2) SAS and Freescale Semiconductor, Inc.
InventorsHisao Kawasaki, David Ney
Estimating the term…
A method of manufacturing an integrated circuit having minimized electromigration effect, wherein the integrated circuit comprises one or more interconnect, said the or each interconnect comprising a dielectric layer having an intrinsic parameter at a first defined value, characterized in that said method comprises: identifying one or more characteristics of the or each interconnect; determining a minimal process distance from the or each interconnect for the application of one or more first metal elements; calculating a required correction parameter which can correct the intrinsic parameter at said first defined value; calculating a required number of the first metal elements which have the intrinsic parameter at a second defined value, such that the second defined value provides the required correction parameter for the first defined value; applying a plurality of said first metal elements around the interconnect at said minimum process distance to overcome the problem of electromigration caused by the intrinsic parameter at the first defined value.
A method of manufacturing an integrated circuit having reduced electromigration effect, wherein the integrated circuit comprises one or more interconnects each interconnect of said one or more interconnects comprising a dielectric layer made of a material having a Young's modulus at a first defined value linked to the material of the dielectric layer, said method comprises:
An integrated circuit comprising:
A computer program comprising instructions for carrying out the method comprising:
Dependencies are inferred from the claim text.