Semiconductor device, lower layer wiring designing device, method of designing lower layer wiring and computer program

Abstract

A semiconductor device includes a lower layer wiring layer, an MIM capacitors and an upper layer wiring layer. The lower layer wiring layer includes a plurality of lower layer wirings. The MIM capacitor is formed above the lower layer wiring layer. The MIM capacitor includes a lower electrode, a capacity dielectric film and an upper electrode which are layered from underneath in this order. A planar form of the upper electrode is smaller than that of the lower electrode. The upper layer wiring layer includes a plurality of upper layer wirings which are connected to the lower electrode and the upper electrode through via plugs. A plane of the upper electrode is made rectangular. The lower layer wirings are not arranged right below one or more than one edge of the plane of the upper electrode.

Dependencies are inferred from the claim text.