Solid-state image pickup device, method of manufacturing the same and electronic apparatus

A solid-state image pickup device manufacturing method comprising the steps of:

• forming a trench in an insulating film formed above a light-receiving portion;
• forming a first waveguide core portion on an inner wall side of the trench;
• filling the trench with a photosensitive material via the first waveguide core portion;
• and
• forming a second waveguide core portion with the photosensitive material partially left in the trench through exposure and development of the photosensitive material and forming a rectangular lens with the photosensitive material partially rectangularly left above the trench.

A solid-state image pickup device manufacturing method comprising the steps of:

• forming a trench in an insulating film formed above a light-receiving portion;
• forming a first waveguide core portion on an inner wall side of the trench;
• filling the trench with an organic material via the first waveguide core portion;
• coating a photosensitive material on the organic material and exposing and developing the photosensitive material to leave a pattern of the photosensitive material above the trench;
• and
• etching the organic material by use of the pattern of the photosensitive material as a mask to form a second waveguide core portion with the organic material partially left in the trench and to form a rectangular lens with the organic material partially rectangularly left above the trench.

An electronic apparatus comprising:

• a solid-state image pickup device;
• and
• a signal processing portion processing a signal
• based on electric charge created by the solid-state image pickup device;
• wherein the solid-state image pickup device includes
• a trench formed in an insulating film above a light-receiving portion,
• a first waveguide core portion provided on an inner wall side of the trench,
• a second waveguide core portion filled in the trench via the first waveguide core portion, and
• a rectangular lens formed of the same material as that of the second waveguide core portion and provided integrally with the second waveguide core portion.