US 2010/0301326 A1 · SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

Abstract

As a display device has higher definition, the number of pixels is increased and thus, the number of gate lines and signal lines is increased. When the number of gate lines and signal lines is increased, it is difficult to mount IC chips including driver circuits for driving the gate lines and the signal lines by bonding or the like, whereby manufacturing cost is increased. A pixel portion and a driver circuit for driving the pixel portion are provided on the same substrate, and at least part of the driver circuit comprises a thin film transistor including an oxide semiconductor sandwiched between gate electrodes. A channel protective layer is provided between the oxide semiconductor and a gate electrode provided over the oxide semiconductor. The pixel portion and the driver circuit are provided on the same substrate, which leads to reduction of manufacturing cost.

Claims14

Dependent claims

A semiconductor device comprising:

a pixel portion including a first thin film transistor including a first oxide semiconductor layer;
and
a driver circuit including an EDMOS circuit having a second thin film transistor including a second oxide semiconductor layer and a third thin film transistor including a third oxide semiconductor layer;
wherein the third thin film transistor comprising a first gate electrode below the third oxide semiconductor layer, a source electrode and a drain electrode over the third oxide semiconductor layer, and a second gate electrode over the third oxide semiconductor layer;
wherein a channel protective layer is provided between the third oxide semiconductor layer and the second gate electrode;
and
wherein the third oxide semiconductor layer is in contact with the channel protective layer.

4 more elements

Dependencies are inferred from the claim text.

Semiconductor device and manufacturing method thereof

Life of this patent

Semiconductor device and manufacturing method thereof

Life of this patent

Abstract

Claims14