Pyrogenic oxides doped with potassium
AssigneeEvonik Degussa GmbH
InventorsHelmut MANGOLD, Wolfgang LORTZ, Rainer GOLCHERT, Helmut ROTH
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Abstract
A method for producing potassium-doped pyrogenic oxides involves mixing a gaseous mixture including a pyrogenic oxide precursor and an aqueous aerosol containing a potassium salt to form an aerosol-gaseous mixture which is then reacted in a flame under conditions suitable for producing pyrogenic oxides by flame oxidation or flame hydrolysis to form the potassium-doped pyrogenic oxides product. The particle product is spherical, has a BET surface between 1 and 1000 m2/g and a narrow distribution of particle size of at least 0.7. The doped oxides can be used as polishing material (CMP application).
Claims5
Pyrogenically produced oxides of metals or metalloids which oxides are doped by means of aerosol with potassium, characterized in that the base component is an oxide that is pyrogenically produced in the manner of flame oxidation or preferably of flame hydrolysis and was doped with potassium from 0.000001 to 20% by wt. and in that the doping amount is preferably in a range of 1 to 20,000 ppm, the doping component is a salt of potassium, the BET surface of the doped oxide is between 1 and 1000 m2/g and the breadth of the distribution of particle size is at least 0.7.
Dependencies are inferred from the claim text.