Method and apparatus for hybrid resolution feedback of a motion stage
AssigneeElectro Scientific Industries, Inc.
InventorMehmet Emin Alpay
Life of this patent
Estimating the term…
Abstract
A method and apparatus is presented for obtaining high resolution positional feedback from motion stages 52 in indexing systems 10 without incurring the costs associated with providing high resolution positional feedback from the entire range of motion by combining low resolution/low cost feedback devices 72 with high resolution/high cost feedback devices 74, 76, 78, 80, 82, 84, 86, 88.
Claims6
An improved method for laser processing articles with a laser processing system, said laser processing system having a motion stage, comprising:
- providing a low resolution positional feedback device operatively connected to said motion stage to indicate the position of said motion stage in a first vicinity including a first position of the motion stages;
- directing said motion stages to move to said first position indicated by said low resolution positional feedback device;
- providing a high resolution positional feedback device operatively connected to said motion stage to indicate a second position of said motion stage in a second vicinity including said first position;
- and
- communicating said second position indicated by said high resolution positional feedback device to said laser processing system.
An improved laser processing system for laser processing articles having a motion stage, the improvements comprising:
- a low resolution positional feedback device operatively connected to said motion stage to indicate a first position of said motion stage;
- and
- a high resolution positional feedback device operatively connected to said motion stage in the vicinity of said first position to indicate a second position of said motion stage.
An improved method for laser processing articles with a laser processing system, said laser processing system having a laser, a laser beam, laser beam steering optics, a controller and a motion stage, the improvements comprising:
- providing a low resolution positional feedback device to indicate the position of said motion stage in a first vicinity including a first position of the motion stage;
- directing said motion stages to move to a first position indicated by said low resolution positional feedback device;
- providing a high resolution positional feedback device operatively connected to said motion stage to indicate a second position of said motion stage in a second vicinity of said first position;
- and
- communicating said second position indicated by said high resolution positional feedback device to said controller.
Dependencies are inferred from the claim text.