Acousto-optic deflector applications in laser processing of dielectric or other materials

A laser processing system for micromachining a workpiece, the system comprising:

• a laser source to generate a laser beam for processing a feature in a surface of the workpiece;
• a first positioner to impart a first relative movement of a laser beam spot position along a processing trajectory with respect to the surface of the workpiece;
• and
• a second positioner comprising an acousto-optic deflector (AOD) subsystem to effectively widen a laser beam spot along a direction perpendicular to the processing trajectory.

A system for dithering a laser beam to process features in a workpiece with a series of laser pulses, the system comprising:

• means for imparting first relative movement of a laser beam spot position along a processing trajectory;
• means for imparting second relative movement of the laser beam spot position along a dither direction relative to the processing trajectory, wherein the second relative movement is superimposed on the first relative movement, and wherein the second relative movement is at a substantially higher velocity than that of the first relative movement;
• means for amplitude modulating a laser beam based on a specific feature characteristic at one or more corresponding target locations on the workpiece;
• and
• means for emitting the laser beam during the second relative movement to effectively widen a laser beam spot at the workpiece in the dither direction.