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AssigneeNational University of Ireland
InventorsAlan Conneely, Helen Howard, Gerard O'Connor, Sedao, Natalie Haustrup
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The present invention relates to a method for laser ablation. The method comprises providing a substrate from which material is to be ablated and providing an ambient environment for the laser ablation process, comprising supplying a prescribed assist gas in a prescribed delivery configuration. The method further comprises focusing a laser beam onto the substrate to be ablated at a power density above an ablation threshold of the material to remove material from the substrate in a laser material interaction zone at or adjacent to the focal point of the laser; and controlling the supply of the assist gas and the laser power to generate a liquid phase in the laser material interaction zone in which the ablated matter is suspended.
A method for generating liquid in a laser ablation process, comprising:
A method for collection of micro and/or nanoscale particles, comprising the steps of:
Use of liquefied assist gas or gases to remove laser-ablated material from a laser material interaction zone in a laser ablation process.
Use of a liquefied assist gas or gases, or a product thereof, to etch a surface of a material in a laser ablation process.
Use of a laser ablation process to generate a liquid etchant close to a laser-ablated feature.
Use of liquefied assist gas to coat or functionalise or structure a laser ablated material surface.
Dependencies are inferred from the claim text.