Device and method for producing microwave plasma with a high plasma density
Assigneeiplas Innovative Plasma Systems GmbH
InventorRalf Spitzl
Life of this patent
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Abstract
A device for producing microwave plasma with a high plasma density. The device comprises at least one microwave supply that is surrounded by an outer dielectric tube. The microwave supply is surrounded by, in addition to the outer dielectric tube, at least one inner dielectric tube that extends inside the outer dielectric tube. The outer dielectric tube and the at least one inner dielectric tube form at least one area that is suitable for receiving and conducting a fluid. The device can be cooled by a fluid. A process gas can be fed into the plasma region by the outer dielectric tube.
Claims28
A device for generating microwave plasmas, said device comprising at least one microwave feed and an outer dielectric tube for surrounding said at least one microwave feed, at least one inner dielectric tube for surrounding said at least one microwave feed, said at least one inner dielectric tube extending inside said outer dielectric tube, and walls connecting said outer dielectric tube and said at least one inner dielectric tube the respective end faces of said outer dielectric tube and said at least one inner dielectric tube, and wherein each of the walls comprises at least one passage for fluid, and forms a space for receiving and conducting fluid.
A method for generating microwave plasmas in a device comprising at least one microwave feed that is surrounded by an inner dielectric tube, said inner dielectric tube being surrounded by an outer dielectric tube, wherein a fluid is conducted through a space between the inner dielectric tube and the outer dielectric tube, said method comprising the steps of:
- connecting both the inner dielectric tube and the outer dielectric tube at the respective end faces with walls, said walls having passages, and
- conducting said fluid through the passages.
Use of a device for generating a plasma for coating, cleaning, modifying and etching workpieces, for treating medical implants, for treating textiles, for sterilisation, for light generation, for light generation in the infrared to ultraviolet spectral region, for converting gases or for gas synthesis, as well as in waste gas purification technology, said device comprising at least one microwave feed and an outer dielectric tube for surrounding said at least one microwave feed, at least one inner dielectric tube for surrounding said at least one microwave feed, said at least one inner dielectric tube extending inside said outer dielectric tube, and walls connecting said outer dielectric tube and said at least one inner dielectric tube at the respective end faces of said outer dielectric tube and said at least one inner dielectric tube, and wherein each of the walls comprises at least one passage for fluid, and forms a space for receiving and conducting fluid.
Use of a device according to a method for generating a plasma for coating, cleaning, modifying and etching workpieces, for treating medical implants, for treating textiles, for sterilisation, for light generation, for light generation in the infrared to ultraviolet spectral region, for converting gases or for gas synthesis, as well as in waste gas purification technology said device comprising at least one microwave feed that is surrounded by an inner dielectric tube, said inner dielectric tube being surrounded by an outer dielectric tube, wherein a fluid is conducted through a space between the inner dielectric tube and the outer dielectric tube said method comprising the steps of:
- connecting both the inner dielectric tube and the outer dielectric tube at the respective end faces with walls, said walls having passages, and
- conducting said fluid through the passages.
Dependencies are inferred from the claim text.