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US 2010/0301004 A1Published application
Fabrication of metallic stamps for replication technology
OwnerBabak HEIDARIinventor
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Abstract
The electrodeposited Nickel stamp is replicated from a conductive master, e.g. Titanium metallic master instead of a photoresist patterned master. The conductive layer is served as a working electrode in the subsequent electrodepositing of the Nickel metal. After the electroplating, Nickel stamps are obtained by peeling the Nickel metal sheet off the conductive layer of the metallic master. Low adhesion between metallic master and Nickel stamp make it possible to delaminate the Nickel stamp without any defects.
Claims18
A process for use in imprinting lithography for fabrication of a metallic stamp, comprising the steps:
- providing base substrate as a carrier;
- providing a conductive layer on top of the carrier;
- providing an outer surface of the conductive layer with a nanostructure and thus obtaining a conductive or metallic master;
- replicating a metallic stamp by electroplating the said conductive or metallic master, such that the nanostructure on the outer surface of the conductive layer of the conductive or metallic master is transferred to the metallic stamp and;
- separating the metallic stamp from the conductive or metallic master and thus obtaining a metallic stamp.
2 more elements
Dependencies are inferred from the claim text.