Ceramic filter
AssigneeNGK Insulators, Ltd.
InventorsTatsuya HISHIKI, Ichiro Wada
Life of this patent
Estimating the term…
Abstract
There is provided a ceramic filter provided with a ceramic porous membrane having few defects, small and uniform membrane thickness, and high resolution performance. The ceramic filter includes; a porous substrate 11 which is a microfiltration membrane (MF membrane), a titania UF membrane 14 which is an ultrafiltration membrane (UF membrane) formed on the porous substrate 11 and has an average pore size of 2 to 20 nm and an average thickness of 0.1 to 1.0 μm, and a silica membrane 1 which is formed on the titania UF membrane 14 and a ceramic porous membrane a part of which has penetrated into pores of the titania UF membrane 14 or into pores of the UF membrane 14 and the porous substrate 11.
Claims17
1-5. (canceled)
A ceramic filter comprising:
- a porous substrate, an ultrafiltration membrane which is formed on the porous substrate and has an average thickness of 0.1 to 1.0 μm and an average pore size of 2 to 20 nm, and a ceramic porous membrane which is formed on the ultrafiltration membrane and a part of which has penetrated into pores of the ultrafiltration membrane.
Dependencies are inferred from the claim text.