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US 2010/0300208 A1Published application
Capacitive electro-mechanical transducer
AssigneeCanon Kabushiki Kaisha
InventorsKazunari Fujii, Yoshitaka Zaitsu
Life of this patent
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Abstract
A capacitive electro-mechanical transducer includes a cell, the cell including a first electrode and a second electrode that is disposed opposite the first electrode with a gap therebetween; and a pressure-adjusting unit for adjusting pressure in the gap.
Claims4
A capacitive electro-mechanical transducer comprising:
- a cell, the cell including a first electrode and a second electrode that is disposed opposite the first electrode with a gap therebetween;
- and
- a pressure-adjusting unit for adjusting pressure in the gap.
Dependencies are inferred from the claim text.