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US 2010/0300202 A1Published application
Gyroscope packaging assembly
AssigneeThe Boeing Company
InventorRichard J. Joyce
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Abstract
Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. In one embodiment, a packaged resonator gyroscope comprises a carrier, a substrate layer mounted to the carrier, a baseplate coupled to the substrate to define a cavity between the substrate and the baseplate, and a resonator mounted to the baseplate and suspended in the cavity. Other embodiments may be described.
Claims19
A packaged resonator gyroscope, comprising:
- a carrier;
- a substrate mounted to the carrier;
- a baseplate coupled to the substrate to define a cavity between the substrate and the baseplate;
- and
- a resonator mounted to the baseplate and suspended in the cavity.
2 more elements
A method of packaging a planar resonator gyroscope, comprising:
- mounting a planar resonator die comprising a planar resonator and a baseplate onto a substrate to define a cavity between the substrate and the baseplate, such that the resonator is suspended in the cavity;
- mounting the substrate to a carrier;
- and
- securing a cap to the carrier.
1 more element
Dependencies are inferred from the claim text.