Information processing apparatus, manufacturing apparatus, and device manufacturing method

A manufacturing apparatus for transferring a pattern to a substrate, the apparatus comprising:

• an information processing apparatus configured to update control information of the manufacturing apparatus,
• the information processing apparatus comprising:
• an updating unit configured to update control information installed in the manufacturing apparatus with new control information;
• and
• a determination unit configured to execute a first determination as to whether there is a consistency between a configuration of the manufacturing apparatus and the new control information based on consistency information indicating a consistency between a configuration of a manufacturing apparatus and control information, to execute a second determination, if the first determination is not negative, as to whether the manufacturing apparatus normally operates after the new control information is installed therein, based on result information indicating a result of installing of a control information in a manufacturing apparatus, and to instruct the updating unit, if the second determination is not negative, to update the control information installed in the manufacturing apparatus with the new control information.

A method of manufacturing a device, the method comprising:

• transferring a pattern to a substrate using a manufacturing apparatus;
• and
• processing the substrate to which the pattern is transferred to manufacture the device,
• the manufacturing apparatus comprising an information processing apparatus configured to update control information installed in the manufacturing apparatus,
• the information processing apparatus comprising:
• an updating unit configured to update control information installed in the manufacturing apparatus with new control information;
• and
• a determination unit configured to execute a first determination as to whether there is a consistency between a configuration of the manufacturing apparatus and the new control information based on consistency information indicating a consistency between a configuration of a manufacturing apparatus and control information, to execute a second determination, if the first determination is not negative, as to whether the manufacturing apparatus normally operates after the new control information is installed therein, based on result information indicating a result of installing of a control information in a manufacturing apparatus, and to instruct the updating unit, if the second determination is not negative, to update the control information installed in the manufacturing apparatus with the new control information.