Amorphous thin films and method of manufacturing same
OwnerMohammed Saadinventor
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Abstract
The present invention relates to amorphous thin films and methods of manufacturing the same. These amorphous thin films contain zirconium oxide (ZrO2), preferably at a concentration of at least 30 mol %, and other metal oxides and have surprisingly good mechanical and optical properties. In some embodiments of the present invention, the thin films may be further processed to obtain fluorinated glasses containing the same metal elements as the metal oxides.
Claims24
An amorphous thin film comprising a first metal oxide and a second metal oxide, said first metal oxide being ZrO2 present in a concentration of at least 30 mol %.
A method for preparing an amorphous thin film comprising the steps of:
- (a) obtaining precursor compounds containing one or more selected constituent metal compounds, wherein each constituent metal compound comprises one or more metal elements and at least one metal element is Zr;
- (b) preparing a solution by mixing the precursor compounds in a solvent;
- (c) hydrolyzing the solution to obtained a hydrolyzed gel;
- and
- (d) drying the hydrolyzed gel to obtain a dried gel forming an amorphous thin film.
Dependencies are inferred from the claim text.