Method for configuring gas supply for electronics fabrication facilities
AssigneePraxair Technology, Inc.
InventorsJeremy Michael Cabral, Shrikar Chakravarti
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Abstract
A system for supplying a reagent to multiple tools in an electronics fabrication facility is configured using a demand probability distribution. In specific examples the reagent is a non-atmospheric or a specialty gas and the demand probability distribution is developed using Monte Carlo statistical techniques.
Claims33
A method for configuring a reagent supply system for an electronic device manufacturing facility, the method comprising:
- a. collecting representative information for process tools within the fabrication facility which use the reagent;
- b. creating a simulation of process tool operation to model an overall demand profile for the process tools;
- c. creating a statistical probability distribution of the reagentdemand by the process tools using data from the model;
- and
- d. correlating data from the probability distribution with supply system characterization data to configure the supply system.
A system for supplying a reagent within an electronics fabrication facility, configured by a process comprising:
- a. generating an overall reagent demand model for multiple process tools that utilize the reagent in the electronics fabrication facility;
- b. repeating step (a) to compile a statistical probability distribution for reagent demand by the multiple process tools;
- and
- c. correlating data from the statistical probability distribution with reagent supply system characterization data to configure the system.
A system for supplying a reagent within an electronics fabrication facility, obtained by a process comprising:
- a. generating an overall reagent demand model for multiple process tools that utilize the reagent in the electronics fabrication facility;
- b. repeating step (a) to compile a statistical probability distribution for reagent demand by the multiple process tools;
- and
- c. configuring a reagent supply system to meet a reagent demand predicted by the statistical probability distribution, thereby obtaining the system.
A method for providing a reagent supply system for delivering the reagent to multiple process tools in a fab, the method comprising:
- a. generating a plurality of model simulations for reagent demand by the multiple process tools over an operation period;
- b. processing the plurality of model simulations to obtain a statistical probability distribution of reagent demand by the multiple process tools;
- and
- c. configuring the reagent supply system to:
- i. meet a maximum and a minimum reagent demand predicted by the probability distribution, thereby optimizing the reagent supply system;
- ii. meet a median demand predicted by the probability distribution;
- or
- iii. correlate with one or more reagent supply system characterization data.
Dependencies are inferred from the claim text.