Microelectronic sensor device with an array of detection cells

A microelectronic sensor device (100, 200) with a matrix array of rows (R1-R5) and columns (C1-C6) of detection cells (110, 210) for detecting target particles at a contact surface, wherein each detection cell (110, 210) comprises

• at least one sensor element (120, 220) for providing a detection signal corresponding to the detection of target particles that assume some activated state, and
• at least one activation element (130, 230) for transferring target particles into said activated state,
• wherein the activation elements (130, 230) in each row (R1-R5) are connected in an associated row-access circuit (RAC4, RAC2) with a common row-access contact,
• and wherein the sensor elements (120, 220) in each column (C1-C6) are connected in an associated column-access circuit (CAC3, CAC1) with a common column-access contact,
• the microelectronic sensor device (100, 200) further comprising
• a control unit (140, 240) for selectively accessing row-access circuits (RAC4, RAC2) via the associated row-access contact,
• and a readout unit (150, 250) for selectively accessing column-access circuits (CAC3, CAC1) via the associated column-access contact.