Apparatus for and method of continuous hts tape buffer layer deposition using large scale ion beam assisted deposition
AssigneeSuperPower, Inc.
InventorsVenkat Selvamanickam, Srinivas Sathiraju
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AssigneeSuperPower, Inc.
InventorsVenkat Selvamanickam, Srinivas Sathiraju
Estimating the term…
The present invention is a high-throughput ion beam assisted deposition (IBAD) system and method of utilizing such a system that enables continuous deposition of thin films such as the buffer layers of HTS tapes. The present invention includes a spool-to-spool feed system that translates a metal substrate tape through the IBAD system as the desired buffer layers are deposited atop the translating substrate tape using an e-beam evaporator assisted by an ion beam. The system further includes a control and monitor system to monitor and regulate all necessary system parameters. The present invention facilitates deposition of a high-quality film over a large area of translating substrate.
A process for continuous deposition of a coating of an HTS tape, comprising:
A process for continuous deposition of a coating of an HTS tape, comprising:
Dependencies are inferred from the claim text.