Method of manufacturing solar cell and plasma treatment apparatus
AssigneeSanyo Electric Co., Ltd.
InventorAkinao Kitahara
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Abstract
This method of manufacturing a solar cell includes a step of forming a photoelectric conversion layer on a substrate with a plasma treatment apparatus including a first electrode provided in a treatment chamber, a second electrode and a gas supply source supplying gas into the treatment chamber. A recess portion having a bottom portion in the form of a curved surface is provided on another surface of the first electrode, while a plurality of through-holes are provided on the bottom portion of the recess portion.
Claims13
A method of manufacturing a solar cell, comprising a step of forming a photoelectric conversion layer on a substrate with a plasma treatment apparatus including a first electrode provided in a treatment chamber, a second electrode opposed to one surface of said first electrode and capable of retaining said substrate and a gas supply source supplying gas into said treatment chamber, wherein
- a recess portion having a bottom portion in the form of a curved surface is provided on another surface of said first electrode, while a plurality of through-holes are provided on said bottom portion of said recess portion.
A plasma treatment apparatus comprising:
- a first electrode provided in a treatment chamber;
- a second electrode opposed to one surface of said first electrode and capable of retaining a substrate;
- and
- a gas supply source supplying gas into said treatment chamber, wherein
- a recess portion having a bottom portion in the form of a curved surface is provided on another surface of said first electrode, while a plurality of through-holes are provided on said bottom portion of said recess portion.
Dependencies are inferred from the claim text.