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US 2010/0248137 A1Published application
Antireflective Coating Compositons
AssigneeAZ Electronic Materials USA Corp.
InventorsDavid Abdallah, Francis Houlihan, Mark Neisser
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Abstract
The present invention discloses novel bottom anti-reflective coating compositions where a coating from the composition has an etch rate that can be regulated by the etch plate temperature.
Claims13
A composition comprising a) a polymer having a ceiling temperature in the range from about 0° C. to about 70° C.;
- b) a crosslinker;
- and c) optionally, a cross-linking catalyst, further where the polymer is selected from,
- (i) a polymer comprising repeating units
- or
- (iii) a polymer comprising repeating units
- where R1, R4, and R20 are each independently selected from hydrogen, halogen, unsubstituted C1-4 alkyl and substituted C1-4 alkyl;
- R7 is a chromophore which absorbs at any actinic wavelength;
- R10 is —(CH2)j—OR8 and R8 is selected from hydrogen, an acid labile group, and a crosslinking site;
- R22 is selected from unsubstituted C1-4 alkyl, substituted C1-4 alkyl, unsubstituted alkoxycarbonyl, substituted alkoxycarbonyl, and crosslinking site;
- R25 is selected from unsubstituted C1-4 alkyl, substituted C1-4 alkyl, C1-4 unsubstituted alkoxy, C1-4 substituted alkoxy, halogen, cyano, and nitro;
- i is 0 or 1;
- j is 0, 1, or 2;
- and z is 1 to 4.
10 more elements
Dependencies are inferred from the claim text.