Sulfonium compound
AssigneeSumitomo Chemical Company, Limited
InventorsTatsuro MASUYAMA, Junji Shigematsu, Hanwoo Park
Life of this patent
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Abstract
The present invention provides a sulfonium compound represented by the formula (I): wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, R1 represents a C5-C42 organic group having a β-ketoester structure and A+ represents an organic counter ion, and a chemically amplified photoresist composition comprising the above-mentioned sulfonium compound and a resin comprising a structural unit having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid.
Claims11
A sulfonium compound represented by the formula (I):
- wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, R1 represents a C5-C42 organic group having a β-ketoester structure and A+ represents an organic counter ion.
A process for production of a sulfonium compound represented by the formula (Ia):
- wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, R1 represents a C5-C42 organic group having a β-ketoester structure and A+ represents an organic counter ion, which comprises reacting a compound represented by the formula (VI):
- Z—R1 (VI)
- wherein R1 is the same as defined above, and Z represents a halogen atom, with a salt represented by the formula (VII):
- wherein Q1, Q2 and A+ are the same as defined above.
A process for production of a sulfonium compound represented by the formula (Ia):
- wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, R1 represents a C5-C42 organic group having a β-ketoester structure and A+ represents an organic counter ion, which comprises reacting a compound represented by the formula (VIII):
- A+L− (VIII)
- wherein A+ is the same as defined above, and L− represents F−, Cl−, Br−, I−, BF4−, AsF6−, SbF6−, PF6− or ClO4−, with a salt represented by the formula (IX):
- wherein Q1, Q2 and R1 are the same as defined above and M+ is Li+, Na+ or K+.
Dependencies are inferred from the claim text.