Turbomolecular pump device and controlling device thereof

A turbomolecular pump device comprising:

• a pump main unit having a rotary vein provided on a rotor, a static vein that works in cooperation with the rotary vein to perform a vacuum exhaust, and a motor for driving the rotor;
• a controlling device, housed within a controlling device case, that includes a motor driving circuit for converting into heat energy, using a regenerative braking resistance, regenerative electric current that is produced when regeneratively driving the motor;
• and
• a cooling device for cooling the controlling device, interposed between the pump main unit and the controlling device;
• wherein:
• the regenerative braking resistance is a rod-shape heating resistive element;
• and this heating resistive element is disposed routed along the inner peripheral surface of an end portion wherein the controlling device case contacts the cooling device.