Turbomolecular pump

Abstract

The provision of the components requiring cooling on top of the cooling mechanism enables the cooling efficiency to be increased. Furthermore, a case of a control device is attached to the cooling mechanism whereon the components requiring cooling are disposed. The cooling mechanism fulfills the role of the contact surface of the case of the control device with the turbomolecular pump main unit, where the case does not have a case panel on the contact surface with the turbomolecular pump main unit. The cooling mechanism fulfills the role of one surface of the case for the control device, where the cooling mechanism is structured integrally with the control device. Additionally, the turbomolecular pump main unit, the cooling mechanism, and the control device are structured integrally by the turbomolecular pump main unit and the cooling mechanism being in contact.

Dependencies are inferred from the claim text.