High temperature ball bearing
AssigneeWafertech, LLC
InventorsXiao-Jun Liu, Mark Chou
Life of this patent
Estimating the term…
Abstract
A ball bearing having external surfaces coated with ceramic materials is provided. The raceways of the ball bearing may advantageously be formed of metal such as stainless steel. The ceramic coating acts as an insulator increasing the resistance of the ball bearing to heat within the ball bearing environment. The balls within the raceway of the ball bearing may advantageously be coated with a lubricant to decrease friction in the ball bearing because the insulating ceramic coating prevents the environmental heat from causing the degradation of the lubricant.
Claims20
A ball bearing comprising:
- an outer raceway formed of metal;
- an inner raceway formed of metal;
- a plurality of rolling elements disposed between said inner and outer raceways,
- said inner raceway including an inwardly facing external surface with a first layer of ceramic disposed thereon;
- and
- said outer raceway including an outwardly facing external surface with a second layer of one of said ceramic and a further ceramic disposed thereon.
A transfer mechanism for transporting wafers within or to or from a semiconductor processing tool, said transfer mechanism comprising:
- a wafer transfer blade member, pivotable about at least one pivot member including a ball bearing comprising:
- an outer raceway formed of stainless steel;
- an inner raceway formed of stainless steel;
- a plurality of rolling elements disposed between said inner and outer raceways,
- said inner raceway including an inwardly facing external surface with a first layer of a ceramic disposed thereon;
- and
- said outer raceway including an outwardly facing external surface with a second layer of one of said ceramic and a further ceramic disposed thereon.
A transfer mechanism for transporting wafers within or to or from a semiconductor processing tool, said transfer mechanism comprising:
- a wafer transfer blade pivotally coupled to a duality of robot arms through respective pivot members, each pivot member including a ball bearing comprising:
- an outer raceway formed of metal;
- an inner raceway formed of metal;
- a plurality of rolling elements disposed between said inner and outer raceways,
- said inner raceway including an inwardly facing external surface coated with a first layer of ceramic;
- and
- said outer raceway including an outwardly facing external surface coated with a second layer of one of said ceramic and a further ceramic.
Dependencies are inferred from the claim text.