Optical waveguide device, its manufacture method, laser module and optical transmission system
AssigneesFujitsu Limited, Sumitomo Electric Device Innovations, Inc.
InventorsAkinori Hayakawa, Takuya Fujii
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Abstract
A first optical waveguide of a convex shape is formed over a substrate. A second optical waveguide of a convex shape is formed over the substrate. A multimode interference waveguide of a convex shape is formed over the substrate for optically coupling the first optical waveguide to the second optical waveguide. Either side of the first optical waveguide is filled with a filling material, but either side of the second optical waveguide is not filled with the filling material.
Claims13
An optical waveguide device comprising:
- a first optical waveguide of a convex shape formed over a substrate, either side of the first optical waveguide being filled with a filling material;
- a second optical waveguide of a convex shape formed over the substrate, either side of the first optical waveguide not being filled with the filling material;
- a multimode interference waveguide of a convex shape formed over the substrate for optically coupling the first optical waveguide to the second optical waveguide.
A manufacture method for an optical waveguide device comprising:
- forming a convex structure over a substrate, the convex structure comprising a first optical waveguide, a multimode interference waveguide and a second optical waveguide coupled in an order recited;
- forming a selective growth mask film over the substrate formed with the convex structure, an edge of the selective growth mask film covering the either side of the multimode interference waveguide being aligned by a position alignment criterion that the edge is located at a position displaced toward the multimode interference waveguide from a point at which the first optical waveguide is connected to the multimode interference waveguide;
- and
- by using the selective growth mask film, selectively filling an either side of the first optical waveguide with a filling material.
An optical waveguide device comprising:
- a semiconductor laser comprising a first optical waveguide of a convex shape formed over a substrate;
- an optical modulator comprising a second optical waveguide of a convex shape formed over the substrate;
- a multimode interference waveguide of a convex shape for optically coupling the first optical waveguide to the second optical waveguide;
- and
- a filling material disposed on either side of the first optical waveguide but does not disposed on either side of the second optical waveguide.
A laser module comprising an optical waveguide device, the optical waveguide device comprising:
- a semiconductor laser comprising a first optical waveguide of a convex shape formed over a substrate;
- an optical modulator comprising a second optical waveguide of a convex shape formed over the substrate;
- a multimode interference waveguide of a convex shape for optically coupling the first optical waveguide to the second optical waveguide;
- and
- a filling material disposed on either side of the first optical waveguide but does not disposed on either side of the second optical waveguide.
An optical transmission system comprising an optical waveguide device, the optical waveguide device comprising:
- a semiconductor laser comprising a first optical waveguide of a convex shape formed over a substrate;
- an optical modulator comprising a second optical waveguide of a convex shape formed over the substrate;
- a multimode interference waveguide of a convex shape for optically coupling the first optical waveguide to the second optical waveguide;
- and
- a filling material disposed on either side of the first optical waveguide but does not disposed on either side of the second optical waveguide.
Dependencies are inferred from the claim text.