Method for detecting surface defects in patterned media
AssigneeHitachi High-Technologies Corporation
InventorAyumu ISHIHARA
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AssigneeHitachi High-Technologies Corporation
InventorAyumu ISHIHARA
Estimating the term…
An optical defect detection method for patterned media includes: irradiating a laser beam onto a patterned medium and obtaining reflected light by reflection very close to a sample; outputting the reflected light as an analog electrical signal from an optical receiver; converting the analog signal to a digital signal; obtaining a surface profile in a track direction by sampling the analog signal; obtaining a servo area profile by setting a slice for detecting servo area; calculating an average value in a track width direction based on plural servo area profiles; generating a master servo area profile based on the average value; obtaining a difference between the master servo area profile and the specific servo area profile; and detecting the presence of a defect including surface roughness, process fluctuation, and adhesion of foreign matters, from a differential waveform.
A method for detecting surface defects in patterned media comprising the steps of:
A method for processing patterned media comprising a first process for producing a patterned medium having a predetermined magnetic pattern, and a second process for detecting defects on a surface of the patterned medium produced by the first process,
Dependencies are inferred from the claim text.