Thin film capacitor and method of manufacturing the same

A method of manufacturing a thin film capacitor, comprising the steps of:

• (a) alternately depositing dielectric films and conductive films on a metal foil to fabricate a laminated body including two or more dielectric films each disposed between the metal foil and a conductive film farthest from the metal foil;
• and
• (b) patterning the laminated body serially from a side of the dielectric film farthest from the metal foil such that these layers have peripheries defining an outer profile flaring toward the bottom of the laminated body as viewed from the stacking direction, and
• in step (b), the dielectric films and the conductive films are processed such that at least one dielectric film of the two or more dielectric films satisfies a relationship B>A>0 wherein A is a gap of the periphery of the conductive film directly below the dielectric film protruding from the periphery of the dielectric film, and B is a gap of the periphery of the dielectric film protruding from the periphery of the conductive film directly above the dielectric film.