Variable shape mirror system

Abstract

A variable shape mirror system includes a deformation section on which a reflection surface and first electrode are formed, a fixing section on which a second electrode is formed, and which is configured to fix the deformation section, and a drive unit, at least one of the first electrode and second electrode is formed into divided electrodes constituted of a plurality of pairs of electrodes, and in the divided electrodes, a division boundary between the electrodes includes a circular shape. One drive voltage indicating signal is subjected to operation processing on the basis of a desired mirror shape for each of the divided electrodes, whereby a drive voltage is generated for each of the electrodes, the variable shape mirror is deformed into a desired shape, and an optimum aspheric component corresponding to the curvature of the reflection surface is realized.

Dependencies are inferred from the claim text.