Micro-structure

A micro-structure comprising:

• a first movable body including a portion having a first layer and a portion having a second layer on the lower side of the first layer;
• a second movable body including a portion having the first layer and a portion having the second layer, to surround the first movable body with a gap therebetween;
• a frame including a portion having the first layer and a portion having the second layer, to surround the second movable body with a gap therebetween;
• first swing supporting portions each of which has the first layer, and connects the portion having the first layer in the first movable body and the portion having the first layer in the second movable body, to support the first movable body to be capable of swinging;
• and
• second swing supporting portions each of which is having the first layer, and connects the portion having the first layer in the second movable body and the portion having the first layer in the frame, to support the second movable body to be capable of swinging,
• wherein a first movable body side end portion of each of the first swing supporting portions is supported from underneath by at least the portion having the second layer in the first movable body, and a second movable body side end portion of each of the first swing supporting portions is supported from underneath by at least the portion having the second layer in the second movable body, and
• a second movable body side end portion of each of the second swing supporting portions is supported from underneath by at least the portion having the second layer in the second movable body, and a frame side end portion of each of the second swing supporting portions is supported from underneath by at least the portion having the second layer in the frame.

An optical switch for reflecting a light input to an input port by a micro-mirror element of which an angle of a mirror surface is controllable, to output reflected light from a desired output port,

• wherein the micro-mirror element comprises:
• a frame including a portion having a first layer and a portion having a second layer on the lower side of the first layer;
• a movable body including a portion having the first layer and a portion having the second layer, on which the mirror surface is formed;
• and
• at least one swing supporting portion has the first layer, and connects the portion having the first layer in the frame and the portion having the first layer in the movable body, to support the movable body to be capable of swinging,
• a frame side end portion of the swing supporting portion is supported from underneath by at least the portion having the second layer in the frame, and
• a movable body side end portion of the swing supporting portion is supported from underneath by at least the portion having the second layer in the movable body.